Large signal performance of micromachined silicon inductive microphones

A mathematical model for the open-circuit output voltage of a micromachined silicon inductive microphone is presented. The model, basically a sine-series function, can easily yield closed-form expressions for the amplitudes of the output components resulting from a multisinusoidal input acoustic pre...

Full description

Saved in:
Bibliographic Details
Main Author: Abuelma’atti, M.T. (author)
Other Authors: unknown (author)
Format: article
Published: 2007
Subjects:
Online Access:https://eprints.kfupm.edu.sa/id/eprint/543/1/large_signal_performance_of_micromachine_abuelma_atti_isi_000249756900014.pdf
Tags: Add Tag
No Tags, Be the first to tag this record!
_version_ 1864513388831309824
author Abuelma’atti, M.T.
author2 unknown
author2_role author
author_facet Abuelma’atti, M.T.
unknown
author_role author
dc.creator.none.fl_str_mv Abuelma’atti, M.T.
unknown
dc.date.none.fl_str_mv 2007-10
2020
dc.format.none.fl_str_mv application/pdf
dc.identifier.none.fl_str_mv https://eprints.kfupm.edu.sa/id/eprint/543/1/large_signal_performance_of_micromachine_abuelma_atti_isi_000249756900014.pdf
(2007) Large signal performance of micromachined silicon inductive microphones. Applied Acoustics, 68 (10). pp. 1286-1296.
10.1016/j.apacoust.2006.06.006
dc.language.none.fl_str_mv en
dc.publisher.none.fl_str_mv ScienceDirect
dc.relation.none.fl_str_mv https://eprints.kfupm.edu.sa/id/eprint/543/
10.1016/j.apacoust.2006.06.006
dc.rights.*.fl_str_mv info:eu-repo/semantics/openAccess
dc.subject.none.fl_str_mv Electrical
dc.title.none.fl_str_mv Large signal performance of micromachined silicon inductive microphones
dc.type.none.fl_str_mv Article
PeerReviewed
info:eu-repo/semantics/publishedVersion
info:eu-repo/semantics/article
description A mathematical model for the open-circuit output voltage of a micromachined silicon inductive microphone is presented. The model, basically a sine-series function, can easily yield closed-form expressions for the amplitudes of the output components resulting from a multisinusoidal input acoustic pressure. The special case of an equal-amplitude two-tone acoustic pressure input is considered in detail. The results show that, the microphone generates both even and odd-order harmonic and intermodulation products.
eu_rights_str_mv openAccess
format article
id KFUPM_1739d7a8c0004fda7be675427f1bd981
identifier_str_mv (2007) Large signal performance of micromachined silicon inductive microphones. Applied Acoustics, 68 (10). pp. 1286-1296.
10.1016/j.apacoust.2006.06.006
language_invalid_str_mv en
network_acronym_str KFUPM
network_name_str King Fahd University of Petroleum and Minerals
oai_identifier_str oai::543
publishDate 2007
publisher.none.fl_str_mv ScienceDirect
repository.mail.fl_str_mv
repository.name.fl_str_mv
repository_id_str
spelling Large signal performance of micromachined silicon inductive microphonesAbuelma’atti, M.T.unknownElectricalA mathematical model for the open-circuit output voltage of a micromachined silicon inductive microphone is presented. The model, basically a sine-series function, can easily yield closed-form expressions for the amplitudes of the output components resulting from a multisinusoidal input acoustic pressure. The special case of an equal-amplitude two-tone acoustic pressure input is considered in detail. The results show that, the microphone generates both even and odd-order harmonic and intermodulation products.ScienceDirect2007-102020ArticlePeerReviewedinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttps://eprints.kfupm.edu.sa/id/eprint/543/1/large_signal_performance_of_micromachine_abuelma_atti_isi_000249756900014.pdf (2007) Large signal performance of micromachined silicon inductive microphones. Applied Acoustics, 68 (10). pp. 1286-1296. 10.1016/j.apacoust.2006.06.006enhttps://eprints.kfupm.edu.sa/id/eprint/543/10.1016/j.apacoust.2006.06.006info:eu-repo/semantics/openAccessoai::5432019-11-01T13:24:20Z
spellingShingle Large signal performance of micromachined silicon inductive microphones
Abuelma’atti, M.T.
Electrical
status_str publishedVersion
title Large signal performance of micromachined silicon inductive microphones
title_full Large signal performance of micromachined silicon inductive microphones
title_fullStr Large signal performance of micromachined silicon inductive microphones
title_full_unstemmed Large signal performance of micromachined silicon inductive microphones
title_short Large signal performance of micromachined silicon inductive microphones
title_sort Large signal performance of micromachined silicon inductive microphones
topic Electrical
url https://eprints.kfupm.edu.sa/id/eprint/543/1/large_signal_performance_of_micromachine_abuelma_atti_isi_000249756900014.pdf