Nonlinear Structural Behavior of Electrically Actuated MEMS Actuator

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Main Author: unknown (author)
Format: masterThesis
Published: 2020
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Online Access:https://eprints.kfupm.edu.sa/id/eprint/139787/1/Nonlinear_Structural_Behavior_of_Electrically_Actuated_MEMS_Actuator.pdf
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author unknown
author_facet unknown
author_role author
dc.creator.*.fl_str_mv unknown
dc.date.*.fl_str_mv 2020
dc.format.none.fl_str_mv application/pdf
dc.identifier.none.fl_str_mv https://eprints.kfupm.edu.sa/id/eprint/139787/1/Nonlinear_Structural_Behavior_of_Electrically_Actuated_MEMS_Actuator.pdf
Nonlinear Structural Behavior of Electrically Actuated MEMS Actuator. Masters thesis, King Fahd University of Petroleum and Minerals.
dc.language.none.fl_str_mv en
dc.relation.none.fl_str_mv https://eprints.kfupm.edu.sa/id/eprint/139787/
dc.rights.*.fl_str_mv info:eu-repo/semantics/openAccess
dc.subject.none.fl_str_mv Electrical
Mechanical
dc.title.none.fl_str_mv Nonlinear Structural Behavior of Electrically Actuated MEMS Actuator
dc.type.none.fl_str_mv Thesis
NonPeerReviewed
info:eu-repo/semantics/publishedVersion
info:eu-repo/semantics/masterThesis
eu_rights_str_mv openAccess
format masterThesis
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identifier_str_mv Nonlinear Structural Behavior of Electrically Actuated MEMS Actuator. Masters thesis, King Fahd University of Petroleum and Minerals.
language_invalid_str_mv en
network_acronym_str KFUPM
network_name_str King Fahd University of Petroleum and Minerals
oai_identifier_str oai::139787
publishDate 2020
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spelling Nonlinear Structural Behavior of Electrically Actuated MEMS ActuatorElectricalMechanicalThesisNonPeerReviewedinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/masterThesisapplication/pdfhttps://eprints.kfupm.edu.sa/id/eprint/139787/1/Nonlinear_Structural_Behavior_of_Electrically_Actuated_MEMS_Actuator.pdf Nonlinear Structural Behavior of Electrically Actuated MEMS Actuator. Masters thesis, King Fahd University of Petroleum and Minerals. enhttps://eprints.kfupm.edu.sa/id/eprint/139787/2020info:eu-repo/semantics/openAccessunknownoai::1397872019-11-01T16:31:35Z
spellingShingle Nonlinear Structural Behavior of Electrically Actuated MEMS Actuator
unknown
Electrical
Mechanical
status_str publishedVersion
title Nonlinear Structural Behavior of Electrically Actuated MEMS Actuator
title_full Nonlinear Structural Behavior of Electrically Actuated MEMS Actuator
title_fullStr Nonlinear Structural Behavior of Electrically Actuated MEMS Actuator
title_full_unstemmed Nonlinear Structural Behavior of Electrically Actuated MEMS Actuator
title_short Nonlinear Structural Behavior of Electrically Actuated MEMS Actuator
title_sort Nonlinear Structural Behavior of Electrically Actuated MEMS Actuator
topic Electrical
Mechanical
url https://eprints.kfupm.edu.sa/id/eprint/139787/1/Nonlinear_Structural_Behavior_of_Electrically_Actuated_MEMS_Actuator.pdf