"Large signal performance of micromachined silicon condenser microphones"

A mathematical model for the open-circuit output voltage of a micromachined silicon condenser microphone with a single deeply corrugated diaphragm as a function of the applied acoustic pressure is presented. The model, basically a sine-series function, can easily yield closed-form expressions for th...

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Bibliographic Details
Main Author: Abuelma’atti, M.T. (author)
Other Authors: unknown (author)
Format: article
Published: 2007
Subjects:
Online Access:https://eprints.kfupm.edu.sa/id/eprint/871/1/large_signal_performance_of_micromachine_abuelma_atti_isi_000246194700002.pdf
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