Measuring and modeling electrostatic adhesion in micromachines
We measure deformations of electrostatically actuated cantilever beams adhered to a substrate and compare results to numerical simulations. Beams are peroxide treated and either supercritically dried or coated with octadecyltrichlorosilane (ODTS). In air with relative humidity (RH) of about 50%, mea...
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | , , , |
| Format: | conferenceObject |
| Published: |
1997
|
| Online Access: | http://hdl.handle.net/10725/7107 http://dx.doi.org/10.1109/SENSOR.1997.613625 http://libraries.lau.edu.lb/research/laur/terms-of-use/articles.php http://ieeexplore.ieee.org/abstract/document/613625/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|