Acoustic radiation-free surface phononic crystal resonator for in-liquid low-noise gravimetric detection
<div><p>Acoustic wave resonators are promising candidates for gravimetric biosensing. However, they generally suffer from strong acoustic radiation in liquid, which limits their quality factor and increases their frequency noise. This article presents an acoustic radiation-free gravimetr...
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| مؤلفون آخرون: | , , , |
| منشور في: |
2021
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| _version_ | 1864513516116901888 |
|---|---|
| author | Feng Gao (3548) |
| author2 | Amine Bermak (1895947) Sarah Benchabane (4422277) Laurent Robert (3952235) Abdelkrim Khelif (4422280) |
| author2_role | author author author author |
| author_facet | Feng Gao (3548) Amine Bermak (1895947) Sarah Benchabane (4422277) Laurent Robert (3952235) Abdelkrim Khelif (4422280) |
| author_role | author |
| dc.creator.none.fl_str_mv | Feng Gao (3548) Amine Bermak (1895947) Sarah Benchabane (4422277) Laurent Robert (3952235) Abdelkrim Khelif (4422280) |
| dc.date.none.fl_str_mv | 2021-01-18T03:00:00Z |
| dc.identifier.none.fl_str_mv | 10.1038/s41378-020-00236-9 |
| dc.relation.none.fl_str_mv | https://figshare.com/articles/journal_contribution/Acoustic_radiation-free_surface_phononic_crystal_resonator_for_in-liquid_low-noise_gravimetric_detection/25781025 |
| dc.rights.none.fl_str_mv | CC BY 4.0 info:eu-repo/semantics/openAccess |
| dc.subject.none.fl_str_mv | Physical sciences Classical physics Acoustic wave resonators Gravimetric biosensing Acoustic radiation Quality factor Frequency noise High aspect ratio electrodes |
| dc.title.none.fl_str_mv | Acoustic radiation-free surface phononic crystal resonator for in-liquid low-noise gravimetric detection |
| dc.type.none.fl_str_mv | Text Journal contribution info:eu-repo/semantics/publishedVersion text contribution to journal |
| description | <div><p>Acoustic wave resonators are promising candidates for gravimetric biosensing. However, they generally suffer from strong acoustic radiation in liquid, which limits their quality factor and increases their frequency noise. This article presents an acoustic radiation-free gravimetric biosensor based on a locally resonant surface phononic crystal (SPC) consisting of periodic high aspect ratio electrodes to address the above issue. The acoustic wave generated in the SPC is slower than the sound wave in water, hence it prevents acoustic propagation in the fluid and results in energy confinement near the electrode surface. This energy confinement results in a significant quality factor improvement and reduces frequency noise. The proposed SPC resonator is numerically studied by finite element analysis and experimentally implemented by an electroplating-based fabrication process. Experimental results show that the SPC resonator exhibits an in-liquid quality factor 15 times higher than a conventional Rayleigh wave resonator at a similar operating frequency. The proposed radiation suppression method using SPC can also be applied in other types of acoustic wave resonators. Thus, this method can serve as a general technique for boosting the in-liquid quality factor and sensing performance of many acoustic biosensors.</p><p> </p></div><h2>Other Information</h2> <p> Published in: Microsystems & Nanoengineering<br> License: <a href="https://creativecommons.org/licenses/by/4.0" target="_blank">https://creativecommons.org/licenses/by/4.0</a><br>See article on publisher's website: <a href="https://dx.doi.org/10.1038/s41378-020-00236-9" target="_blank">https://dx.doi.org/10.1038/s41378-020-00236-9</a></p> |
| eu_rights_str_mv | openAccess |
| id | Manara2_251796189daa70f35ddef8db65451b40 |
| identifier_str_mv | 10.1038/s41378-020-00236-9 |
| network_acronym_str | Manara2 |
| network_name_str | Manara2 |
| oai_identifier_str | oai:figshare.com:article/25781025 |
| publishDate | 2021 |
| repository.mail.fl_str_mv | |
| repository.name.fl_str_mv | |
| repository_id_str | |
| rights_invalid_str_mv | CC BY 4.0 |
| spelling | Acoustic radiation-free surface phononic crystal resonator for in-liquid low-noise gravimetric detectionFeng Gao (3548)Amine Bermak (1895947)Sarah Benchabane (4422277)Laurent Robert (3952235)Abdelkrim Khelif (4422280)Physical sciencesClassical physicsAcoustic wave resonatorsGravimetric biosensingAcoustic radiationQuality factorFrequency noiseHigh aspect ratio electrodes<div><p>Acoustic wave resonators are promising candidates for gravimetric biosensing. However, they generally suffer from strong acoustic radiation in liquid, which limits their quality factor and increases their frequency noise. This article presents an acoustic radiation-free gravimetric biosensor based on a locally resonant surface phononic crystal (SPC) consisting of periodic high aspect ratio electrodes to address the above issue. The acoustic wave generated in the SPC is slower than the sound wave in water, hence it prevents acoustic propagation in the fluid and results in energy confinement near the electrode surface. This energy confinement results in a significant quality factor improvement and reduces frequency noise. The proposed SPC resonator is numerically studied by finite element analysis and experimentally implemented by an electroplating-based fabrication process. Experimental results show that the SPC resonator exhibits an in-liquid quality factor 15 times higher than a conventional Rayleigh wave resonator at a similar operating frequency. The proposed radiation suppression method using SPC can also be applied in other types of acoustic wave resonators. Thus, this method can serve as a general technique for boosting the in-liquid quality factor and sensing performance of many acoustic biosensors.</p><p> </p></div><h2>Other Information</h2> <p> Published in: Microsystems & Nanoengineering<br> License: <a href="https://creativecommons.org/licenses/by/4.0" target="_blank">https://creativecommons.org/licenses/by/4.0</a><br>See article on publisher's website: <a href="https://dx.doi.org/10.1038/s41378-020-00236-9" target="_blank">https://dx.doi.org/10.1038/s41378-020-00236-9</a></p>2021-01-18T03:00:00ZTextJournal contributioninfo:eu-repo/semantics/publishedVersiontextcontribution to journal10.1038/s41378-020-00236-9https://figshare.com/articles/journal_contribution/Acoustic_radiation-free_surface_phononic_crystal_resonator_for_in-liquid_low-noise_gravimetric_detection/25781025CC BY 4.0info:eu-repo/semantics/openAccessoai:figshare.com:article/257810252021-01-18T03:00:00Z |
| spellingShingle | Acoustic radiation-free surface phononic crystal resonator for in-liquid low-noise gravimetric detection Feng Gao (3548) Physical sciences Classical physics Acoustic wave resonators Gravimetric biosensing Acoustic radiation Quality factor Frequency noise High aspect ratio electrodes |
| status_str | publishedVersion |
| title | Acoustic radiation-free surface phononic crystal resonator for in-liquid low-noise gravimetric detection |
| title_full | Acoustic radiation-free surface phononic crystal resonator for in-liquid low-noise gravimetric detection |
| title_fullStr | Acoustic radiation-free surface phononic crystal resonator for in-liquid low-noise gravimetric detection |
| title_full_unstemmed | Acoustic radiation-free surface phononic crystal resonator for in-liquid low-noise gravimetric detection |
| title_short | Acoustic radiation-free surface phononic crystal resonator for in-liquid low-noise gravimetric detection |
| title_sort | Acoustic radiation-free surface phononic crystal resonator for in-liquid low-noise gravimetric detection |
| topic | Physical sciences Classical physics Acoustic wave resonators Gravimetric biosensing Acoustic radiation Quality factor Frequency noise High aspect ratio electrodes |