Study of wide bandgap SnO<sub>x</sub> thin films grown by a reactive magnetron sputtering via a two-step method
<p dir="ltr">In the present work, we report on the microstructural and optoelectronic properties of SnO<sub>x</sub> thin films deposited by a reactive radio frequency magnetron sputtering. After SnO<sub>x</sub> growth by sputtering under O<sub>2</sub&...
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| مؤلفون آخرون: | , , , , , |
| منشور في: |
2022
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| _version_ | 1864513512757264384 |
|---|---|
| author | Y. Zakaria (17886725) |
| author2 | B. Aïssa (17886728) T. Fix (7592447) S. Ahzi (17886731) A. Samara (18300817) S. Mansour (7211648) A. Slaoui (1786944) |
| author2_role | author author author author author author |
| author_facet | Y. Zakaria (17886725) B. Aïssa (17886728) T. Fix (7592447) S. Ahzi (17886731) A. Samara (18300817) S. Mansour (7211648) A. Slaoui (1786944) |
| author_role | author |
| dc.creator.none.fl_str_mv | Y. Zakaria (17886725) B. Aïssa (17886728) T. Fix (7592447) S. Ahzi (17886731) A. Samara (18300817) S. Mansour (7211648) A. Slaoui (1786944) |
| dc.date.none.fl_str_mv | 2022-09-12T06:00:00Z |
| dc.identifier.none.fl_str_mv | 10.1038/s41598-022-19270-w |
| dc.relation.none.fl_str_mv | https://figshare.com/articles/journal_contribution/Study_of_wide_bandgap_SnO_sub_x_sub_thin_films_grown_by_a_reactive_magnetron_sputtering_via_a_two-step_method/26021038 |
| dc.rights.none.fl_str_mv | CC BY 4.0 info:eu-repo/semantics/openAccess |
| dc.subject.none.fl_str_mv | Engineering Fluid mechanics and thermal engineering Materials engineering Transparent conductive oxides (TCOs) Solar cells Light-emitting diodes (LEDs) Flat panel displays Tin oxide (SnOx) Gas sensors Electrical conductivity |
| dc.title.none.fl_str_mv | Study of wide bandgap SnO<sub>x</sub> thin films grown by a reactive magnetron sputtering via a two-step method |
| dc.type.none.fl_str_mv | Text Journal contribution info:eu-repo/semantics/publishedVersion text contribution to journal |
| description | <p dir="ltr">In the present work, we report on the microstructural and optoelectronic properties of SnO<sub>x</sub> thin films deposited by a reactive radio frequency magnetron sputtering. After SnO<sub>x</sub> growth by sputtering under O<sub>2</sub>/Ar flow, we have used three different treatment methods, namely (1) as deposited films under O<sub>2</sub>/Ar, (2) vacuum annealed films ex-situ, and (3) air annealed films ex-situ. Effects of the O<sub>2</sub>/Ar ratios and the growth temperature were investigated for each treatment method. We have thoroughly investigated the structural, optical, electrical and morphology of the different films by several advanced techniques. The best compromise between electrical conductivity and optical transmission for the use of these SnO<sub>x</sub> films as an n-type TCO was the conditions O<sub>2</sub>/Ar = 1.5% during the growth process, at 250 °C, followed by a vacuum post thermal annealing performed at 5 × 10<sup>–4</sup> Torr. Our results pointed out clear correlations between the growth conditions, the microstructural and optoelectronic properties, where highly electrically conductive films were found to be associated to larger grains size microstructure. Effects of O<sub>2</sub>/Ar flow and the thermal annealing process were also analysed and discussed thoroughly.</p><h2>Other Information</h2><p dir="ltr">Published in: Scientific Reports<br>License: <a href="https://creativecommons.org/licenses/by/4.0" target="_blank">https://creativecommons.org/licenses/by/4.0</a><br>See article on publisher's website: <a href="https://dx.doi.org/10.1038/s41598-022-19270-w" target="_blank">https://dx.doi.org/10.1038/s41598-022-19270-w</a></p><p dir="ltr">Additional institutions affiliated with: Core Labs - QEERI</p> |
| eu_rights_str_mv | openAccess |
| id | Manara2_7c0b426abf8b9dec4920fc3e7d68fffc |
| identifier_str_mv | 10.1038/s41598-022-19270-w |
| network_acronym_str | Manara2 |
| network_name_str | Manara2 |
| oai_identifier_str | oai:figshare.com:article/26021038 |
| publishDate | 2022 |
| repository.mail.fl_str_mv | |
| repository.name.fl_str_mv | |
| repository_id_str | |
| rights_invalid_str_mv | CC BY 4.0 |
| spelling | Study of wide bandgap SnO<sub>x</sub> thin films grown by a reactive magnetron sputtering via a two-step methodY. Zakaria (17886725)B. Aïssa (17886728)T. Fix (7592447)S. Ahzi (17886731)A. Samara (18300817)S. Mansour (7211648)A. Slaoui (1786944)EngineeringFluid mechanics and thermal engineeringMaterials engineeringTransparent conductive oxides (TCOs)Solar cellsLight-emitting diodes (LEDs)Flat panel displaysTin oxide (SnOx)Gas sensorsElectrical conductivity<p dir="ltr">In the present work, we report on the microstructural and optoelectronic properties of SnO<sub>x</sub> thin films deposited by a reactive radio frequency magnetron sputtering. After SnO<sub>x</sub> growth by sputtering under O<sub>2</sub>/Ar flow, we have used three different treatment methods, namely (1) as deposited films under O<sub>2</sub>/Ar, (2) vacuum annealed films ex-situ, and (3) air annealed films ex-situ. Effects of the O<sub>2</sub>/Ar ratios and the growth temperature were investigated for each treatment method. We have thoroughly investigated the structural, optical, electrical and morphology of the different films by several advanced techniques. The best compromise between electrical conductivity and optical transmission for the use of these SnO<sub>x</sub> films as an n-type TCO was the conditions O<sub>2</sub>/Ar = 1.5% during the growth process, at 250 °C, followed by a vacuum post thermal annealing performed at 5 × 10<sup>–4</sup> Torr. Our results pointed out clear correlations between the growth conditions, the microstructural and optoelectronic properties, where highly electrically conductive films were found to be associated to larger grains size microstructure. Effects of O<sub>2</sub>/Ar flow and the thermal annealing process were also analysed and discussed thoroughly.</p><h2>Other Information</h2><p dir="ltr">Published in: Scientific Reports<br>License: <a href="https://creativecommons.org/licenses/by/4.0" target="_blank">https://creativecommons.org/licenses/by/4.0</a><br>See article on publisher's website: <a href="https://dx.doi.org/10.1038/s41598-022-19270-w" target="_blank">https://dx.doi.org/10.1038/s41598-022-19270-w</a></p><p dir="ltr">Additional institutions affiliated with: Core Labs - QEERI</p>2022-09-12T06:00:00ZTextJournal contributioninfo:eu-repo/semantics/publishedVersiontextcontribution to journal10.1038/s41598-022-19270-whttps://figshare.com/articles/journal_contribution/Study_of_wide_bandgap_SnO_sub_x_sub_thin_films_grown_by_a_reactive_magnetron_sputtering_via_a_two-step_method/26021038CC BY 4.0info:eu-repo/semantics/openAccessoai:figshare.com:article/260210382022-09-12T06:00:00Z |
| spellingShingle | Study of wide bandgap SnO<sub>x</sub> thin films grown by a reactive magnetron sputtering via a two-step method Y. Zakaria (17886725) Engineering Fluid mechanics and thermal engineering Materials engineering Transparent conductive oxides (TCOs) Solar cells Light-emitting diodes (LEDs) Flat panel displays Tin oxide (SnOx) Gas sensors Electrical conductivity |
| status_str | publishedVersion |
| title | Study of wide bandgap SnO<sub>x</sub> thin films grown by a reactive magnetron sputtering via a two-step method |
| title_full | Study of wide bandgap SnO<sub>x</sub> thin films grown by a reactive magnetron sputtering via a two-step method |
| title_fullStr | Study of wide bandgap SnO<sub>x</sub> thin films grown by a reactive magnetron sputtering via a two-step method |
| title_full_unstemmed | Study of wide bandgap SnO<sub>x</sub> thin films grown by a reactive magnetron sputtering via a two-step method |
| title_short | Study of wide bandgap SnO<sub>x</sub> thin films grown by a reactive magnetron sputtering via a two-step method |
| title_sort | Study of wide bandgap SnO<sub>x</sub> thin films grown by a reactive magnetron sputtering via a two-step method |
| topic | Engineering Fluid mechanics and thermal engineering Materials engineering Transparent conductive oxides (TCOs) Solar cells Light-emitting diodes (LEDs) Flat panel displays Tin oxide (SnOx) Gas sensors Electrical conductivity |