Supplementary Material 2

This file contains raw ULIE-SIMS data for calibration samples C1-C6

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Bibliographic Details
Main Author:	Adrianna Rejmer (22553717) (author)
Other Authors:	Ayse Ozcan Atar (22553720) (author), Walery Kolkowski (22553723) (author), Iwona Pasternak (1358928) (author), Sylwia Kozdra (22553726) (author), Andrzej Materna (22553729) (author), Emanuele Pelucchi (1722181) (author), Wlodzimierz Strupinski (22553732) (author), Pawel Michalowski (22553735) (author)
Published:	2025
Subjects:	Physical sciences ULIE-SIMS calibration ECV measurements Si diffusion
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