Selective-Area Deposition of Indium and Its Plasmonic Properties

We present an effective process sequence for the deposition of indium nanostructures using molecular beam epitaxy (MBE) on a silicon substrate. Using a template structure composed of inverted pyramids and V-grooves, we deposit indium nanostructures with various dimensions. Spatially resolved cathodo...

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Main Author: Didem Dede (4053604) (author)
Other Authors: Evelijn Akerboom (14077642) (author), Riccardo Brondolin (22822337) (author), Tom Veeken (14077645) (author), Thomas Hagger (22822340) (author), Raphael Lemerle (19672321) (author), Esther Alarcon Llado (22822343) (author), Valerio Piazza (10525489) (author), W. Craig Carter (1824082) (author), Albert Polman (1429483) (author), Anna Fontcuberta i Morral (1305120) (author)
Published: 2025
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_version_ 1852014022093701120
author Didem Dede (4053604)
author2 Evelijn Akerboom (14077642)
Riccardo Brondolin (22822337)
Tom Veeken (14077645)
Thomas Hagger (22822340)
Raphael Lemerle (19672321)
Esther Alarcon Llado (22822343)
Valerio Piazza (10525489)
W. Craig Carter (1824082)
Albert Polman (1429483)
Anna Fontcuberta i Morral (1305120)
author2_role author
author
author
author
author
author
author
author
author
author
author_facet Didem Dede (4053604)
Evelijn Akerboom (14077642)
Riccardo Brondolin (22822337)
Tom Veeken (14077645)
Thomas Hagger (22822340)
Raphael Lemerle (19672321)
Esther Alarcon Llado (22822343)
Valerio Piazza (10525489)
W. Craig Carter (1824082)
Albert Polman (1429483)
Anna Fontcuberta i Morral (1305120)
author_role author
dc.creator.none.fl_str_mv Didem Dede (4053604)
Evelijn Akerboom (14077642)
Riccardo Brondolin (22822337)
Tom Veeken (14077645)
Thomas Hagger (22822340)
Raphael Lemerle (19672321)
Esther Alarcon Llado (22822343)
Valerio Piazza (10525489)
W. Craig Carter (1824082)
Albert Polman (1429483)
Anna Fontcuberta i Morral (1305120)
dc.date.none.fl_str_mv 2025-12-10T19:35:06Z
dc.identifier.none.fl_str_mv 10.1021/acsaom.5c00373.s002
dc.relation.none.fl_str_mv https://figshare.com/articles/dataset/Selective-Area_Deposition_of_Indium_and_Its_Plasmonic_Properties/30853820
dc.rights.none.fl_str_mv CC BY-NC 4.0
info:eu-repo/semantics/openAccess
dc.subject.none.fl_str_mv Biophysics
Medicine
Cell Biology
Biotechnology
Evolutionary Biology
Ecology
Inorganic Chemistry
Computational Biology
Chemical Sciences not elsewhere classified
Physical Sciences not elsewhere classified
template structure composed
surface plasmon polaritons
localized surface plasmon
high optical quality
effective process sequence
deposit indium nanostructures
plasmonic nanostructures
nanostructures enables
various dimensions
spps ),
spherical particles
spectral range
smallest particles
silicon substrate
plasmonic properties
peak wavelength
inverted pyramids
grown indium
full width
beam energy
array ’
70 nm
300 nm
dc.title.none.fl_str_mv Selective-Area Deposition of Indium and Its Plasmonic Properties
dc.type.none.fl_str_mv Dataset
info:eu-repo/semantics/publishedVersion
dataset
description We present an effective process sequence for the deposition of indium nanostructures using molecular beam epitaxy (MBE) on a silicon substrate. Using a template structure composed of inverted pyramids and V-grooves, we deposit indium nanostructures with various dimensions. Spatially resolved cathodoluminescence spectroscopy (CL) using an electron-beam energy of 30 keV electrons shows a localized surface plasmon (LSP) resonance in spherical particles with a peak wavelength at 300 nm and a full width at half-maximum of 70 nm for the smallest particles (diameter of 85 nm), showing high optical quality of the grown indium. V-groove template structures create indium nanowires for which CL spectroscopy reveals efficient propagation of surface plasmon polaritons (SPPs), and angle-resolved CL on the periodic inverted pyramids reveals optical lattice resonances arising from the array’s periodicity. The high optical quality of these nanostructures enables further applications of plasmonic nanostructures in the ultraviolet (UV) spectral range.
eu_rights_str_mv openAccess
id Manara_ef4bf0c26bd2a024672f48ea07bdacc5
identifier_str_mv 10.1021/acsaom.5c00373.s002
network_acronym_str Manara
network_name_str ManaraRepo
oai_identifier_str oai:figshare.com:article/30853820
publishDate 2025
repository.mail.fl_str_mv
repository.name.fl_str_mv
repository_id_str
rights_invalid_str_mv CC BY-NC 4.0
spelling Selective-Area Deposition of Indium and Its Plasmonic PropertiesDidem Dede (4053604)Evelijn Akerboom (14077642)Riccardo Brondolin (22822337)Tom Veeken (14077645)Thomas Hagger (22822340)Raphael Lemerle (19672321)Esther Alarcon Llado (22822343)Valerio Piazza (10525489)W. Craig Carter (1824082)Albert Polman (1429483)Anna Fontcuberta i Morral (1305120)BiophysicsMedicineCell BiologyBiotechnologyEvolutionary BiologyEcologyInorganic ChemistryComputational BiologyChemical Sciences not elsewhere classifiedPhysical Sciences not elsewhere classifiedtemplate structure composedsurface plasmon polaritonslocalized surface plasmonhigh optical qualityeffective process sequencedeposit indium nanostructuresplasmonic nanostructuresnanostructures enablesvarious dimensionsspps ),spherical particlesspectral rangesmallest particlessilicon substrateplasmonic propertiespeak wavelengthinverted pyramidsgrown indiumfull widthbeam energyarray ’70 nm300 nmWe present an effective process sequence for the deposition of indium nanostructures using molecular beam epitaxy (MBE) on a silicon substrate. Using a template structure composed of inverted pyramids and V-grooves, we deposit indium nanostructures with various dimensions. Spatially resolved cathodoluminescence spectroscopy (CL) using an electron-beam energy of 30 keV electrons shows a localized surface plasmon (LSP) resonance in spherical particles with a peak wavelength at 300 nm and a full width at half-maximum of 70 nm for the smallest particles (diameter of 85 nm), showing high optical quality of the grown indium. V-groove template structures create indium nanowires for which CL spectroscopy reveals efficient propagation of surface plasmon polaritons (SPPs), and angle-resolved CL on the periodic inverted pyramids reveals optical lattice resonances arising from the array’s periodicity. The high optical quality of these nanostructures enables further applications of plasmonic nanostructures in the ultraviolet (UV) spectral range.2025-12-10T19:35:06ZDatasetinfo:eu-repo/semantics/publishedVersiondataset10.1021/acsaom.5c00373.s002https://figshare.com/articles/dataset/Selective-Area_Deposition_of_Indium_and_Its_Plasmonic_Properties/30853820CC BY-NC 4.0info:eu-repo/semantics/openAccessoai:figshare.com:article/308538202025-12-10T19:35:06Z
spellingShingle Selective-Area Deposition of Indium and Its Plasmonic Properties
Didem Dede (4053604)
Biophysics
Medicine
Cell Biology
Biotechnology
Evolutionary Biology
Ecology
Inorganic Chemistry
Computational Biology
Chemical Sciences not elsewhere classified
Physical Sciences not elsewhere classified
template structure composed
surface plasmon polaritons
localized surface plasmon
high optical quality
effective process sequence
deposit indium nanostructures
plasmonic nanostructures
nanostructures enables
various dimensions
spps ),
spherical particles
spectral range
smallest particles
silicon substrate
plasmonic properties
peak wavelength
inverted pyramids
grown indium
full width
beam energy
array ’
70 nm
300 nm
status_str publishedVersion
title Selective-Area Deposition of Indium and Its Plasmonic Properties
title_full Selective-Area Deposition of Indium and Its Plasmonic Properties
title_fullStr Selective-Area Deposition of Indium and Its Plasmonic Properties
title_full_unstemmed Selective-Area Deposition of Indium and Its Plasmonic Properties
title_short Selective-Area Deposition of Indium and Its Plasmonic Properties
title_sort Selective-Area Deposition of Indium and Its Plasmonic Properties
topic Biophysics
Medicine
Cell Biology
Biotechnology
Evolutionary Biology
Ecology
Inorganic Chemistry
Computational Biology
Chemical Sciences not elsewhere classified
Physical Sciences not elsewhere classified
template structure composed
surface plasmon polaritons
localized surface plasmon
high optical quality
effective process sequence
deposit indium nanostructures
plasmonic nanostructures
nanostructures enables
various dimensions
spps ),
spherical particles
spectral range
smallest particles
silicon substrate
plasmonic properties
peak wavelength
inverted pyramids
grown indium
full width
beam energy
array ’
70 nm
300 nm