Experimental and Numerical Analysis of a MEMS Resonator for Sensing and Filtering Applications
A Master of Science thesis in Mechanical Engineering by Mohammed Al Hadi entitled, “Experimental and Numerical Analysis of a MEMS Resonator for Sensing and Filtering Applications”, submitted in September 2025. Thesis advisor is Dr. Mehdi Ghommem and thesis co-advisor is Dr. Nouha Alcheikh. Soft copy...
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| المؤلف الرئيسي: | |
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| التنسيق: | doctoralThesis |
| منشور في: |
2025
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| الموضوعات: | |
| الوصول للمادة أونلاين: | https://hdl.handle.net/11073/33505 |
| الوسوم: |
إضافة وسم
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| _version_ | 1870676404166721536 |
|---|---|
| author | Al Hadi, Mohammed |
| author_facet | Al Hadi, Mohammed |
| author_role | author |
| dc.contributor.none.fl_str_mv | Ghommem, Mehdi Alcheikh, Nouha |
| dc.creator.none.fl_str_mv | Al Hadi, Mohammed |
| dc.date.none.fl_str_mv | 2025-09 2026-06-18T06:54:05Z 2026-06-18T06:54:05Z |
| dc.format.none.fl_str_mv | application/pdf |
| dc.identifier.none.fl_str_mv | 35.232-2025.75 https://hdl.handle.net/11073/33505 |
| dc.language.none.fl_str_mv | en_US |
| dc.relation.none.fl_str_mv | Master of Science in Mechanical Engineering (MSME) |
| dc.subject.none.fl_str_mv | Nonlinear dynamics MEMS Pressure sensing Signal filtering, cyclic-fold bifurcation Tapping mode |
| dc.title.none.fl_str_mv | Experimental and Numerical Analysis of a MEMS Resonator for Sensing and Filtering Applications |
| dc.type.none.fl_str_mv | info:eu-repo/semantics/publishedVersion info:eu-repo/semantics/doctoralThesis |
| description | A Master of Science thesis in Mechanical Engineering by Mohammed Al Hadi entitled, “Experimental and Numerical Analysis of a MEMS Resonator for Sensing and Filtering Applications”, submitted in September 2025. Thesis advisor is Dr. Mehdi Ghommem and thesis co-advisor is Dr. Nouha Alcheikh. Soft copy is available (Thesis, Completion Certificate, Approval Signatures, and AUS Archives Consent Form). |
| format | doctoralThesis |
| id | aus_1677fb0cf4b1e3328362bbaad2c97ceb |
| identifier_str_mv | 35.232-2025.75 |
| language_invalid_str_mv | en_US |
| network_acronym_str | aus |
| network_name_str | aus |
| oai_identifier_str | oai:repository.aus.edu:11073/33505 |
| publishDate | 2025 |
| repository.mail.fl_str_mv | |
| repository.name.fl_str_mv | |
| repository_id_str | |
| spelling | Experimental and Numerical Analysis of a MEMS Resonator for Sensing and Filtering ApplicationsAl Hadi, MohammedNonlinear dynamicsMEMSPressure sensingSignal filtering, cyclic-fold bifurcationTapping modeA Master of Science thesis in Mechanical Engineering by Mohammed Al Hadi entitled, “Experimental and Numerical Analysis of a MEMS Resonator for Sensing and Filtering Applications”, submitted in September 2025. Thesis advisor is Dr. Mehdi Ghommem and thesis co-advisor is Dr. Nouha Alcheikh. Soft copy is available (Thesis, Completion Certificate, Approval Signatures, and AUS Archives Consent Form).This thesis presents an experimental and numerical investigation of the nonlinear dynamics of an electrostatically actuated MEMS resonator composed of a microplate supported by two symmetrical cantilever beams. The device was characterized using both optical and electrical measurement techniques, revealing pronounced nonlinear phenomena such as amplitude-dependent resonance shifts, frequency softening and hardening, cyclic-fold bifurcations, and nonlinear tapping mode. By harnessing these nonlinearities, two application domains were demonstrated: vacuum pressure sensing and tunable bandpass filtering. As a pressure sensor, the device achieved high sensitivities of 10,068 ppm/Torr in the 0.5–9 Torr range and 1,831 ppm/Torr in the 10–100 Torr range, with excellent linearity (R² > 0.98). Even in higher pressure regimes (300–500 Torr), the sensor maintained sensitivities up to 154 ppm/Torr under purely electrostatic actuation. Importantly, the high-sensitivity region was tunable through DC bias adjustment, enabling up to a sixfold increase in sensitivity at higher pressures. Compared to state-of-the-art MEMS sensors, the proposed device outperforms prior designs by more than one order of magnitude in low-pressure regimes while maintaining low power consumption. As a bandpass filter, the resonator exhibited reconfigurable center frequency operation between 33.91 and 40.46 kHz and a tunable fractional bandwidth (FBW) ranging from 4.18–15.1% at 0.5 Torr, 4.18–11.6% at 3 Torr, and up to 27.9–36.9% at atmospheric pressure. These bandwidth values exceed those of existing MEMS filters, which typically report FBW below 17%, while offering dynamic tunability of both bandwidth and center frequency by exploiting bifurcation and tapping model. Overall, this work establishes a dual-function MEMS device that simultaneously advances pressure sensing and signal filtering technologies. By adjusting nonlinear dynamic effects, the proposed resonator achieves performance levels surpassing those reported in the literature, while offering tunability, compactness, and low-power operation.College of EngineeringDepartment of Mechanical EngineeringMaster of Science in Mechanical Engineering (MSME)Ghommem, MehdiAlcheikh, Nouha2026-06-18T06:54:05Z2026-06-18T06:54:05Z2025-09info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/doctoralThesisapplication/pdf35.232-2025.75https://hdl.handle.net/11073/33505en_USMaster of Science in Mechanical Engineering (MSME)oai:repository.aus.edu:11073/335052026-06-19T06:25:55Z |
| spellingShingle | Experimental and Numerical Analysis of a MEMS Resonator for Sensing and Filtering Applications Al Hadi, Mohammed Nonlinear dynamics MEMS Pressure sensing Signal filtering, cyclic-fold bifurcation Tapping mode |
| status_str | publishedVersion |
| title | Experimental and Numerical Analysis of a MEMS Resonator for Sensing and Filtering Applications |
| title_full | Experimental and Numerical Analysis of a MEMS Resonator for Sensing and Filtering Applications |
| title_fullStr | Experimental and Numerical Analysis of a MEMS Resonator for Sensing and Filtering Applications |
| title_full_unstemmed | Experimental and Numerical Analysis of a MEMS Resonator for Sensing and Filtering Applications |
| title_short | Experimental and Numerical Analysis of a MEMS Resonator for Sensing and Filtering Applications |
| title_sort | Experimental and Numerical Analysis of a MEMS Resonator for Sensing and Filtering Applications |
| topic | Nonlinear dynamics MEMS Pressure sensing Signal filtering, cyclic-fold bifurcation Tapping mode |
| url | https://hdl.handle.net/11073/33505 |