Development of MOF-Coated Electrostatic Mems Resonators for Gas and Chemical Sensing Applications

Development of MOF-Coated Electrostatic Mems Resonators for Gas and Chemical Sensing Applications

A Master of Science thesis in Mechatronics Engineering by Mohamed Mahmoud Hemid entitled, “Development of MOF-Coated Electrostatic Mems Resonators for Gas and Chemical Sensing Applications”, submitted in April 2024. Thesis advisor is Dr. Mehdi Ghommem and thesis co-advisor is Dr. Rana Sabouni. Soft...

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Bibliographic Details
Main Author:	Hemid, Mohamed Mahmoud (author)
Format:	doctoralThesis
Published:	2024
Subjects:	MEMS Gas sensor Chemical sensing Metal organic framework Electrostatic actuation Motion-induced current Nonlinear dynamics Bifurcations
Online Access:	https://hdl.handle.net/11073/25810
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