Modeling and Control of a Thermally Driven MEMS Actuator for RF Applications

Modeling and Control of a Thermally Driven MEMS Actuator for RF Applications

A Master of Science thesis in Electrical Engineering by Shahabeddin Vamegh Estahbanati entitled, "Modeling and Control of a Thermally Driven MEMS Actuator for RF Applications," submitted in May 2017. Thesis advisor is Dr. Rached Dhaouadi and thesis co-advisor is Dr. Maher Bakri-Kassem. Sof...

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Bibliographic Details
Main Author: Estahbanati, Shahabeddin Vamegh (author)
Format: doctoralThesis
Published: 2017
Subjects:
MEMS actuators
microelectromechanical systems (MEMS)
macromodeling
Galerkin method
adaptive control
Radio frequency microelectromechanical systems
Online Access:http://hdl.handle.net/11073/8913
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Summary:A Master of Science thesis in Electrical Engineering by Shahabeddin Vamegh Estahbanati entitled, "Modeling and Control of a Thermally Driven MEMS Actuator for RF Applications," submitted in May 2017. Thesis advisor is Dr. Rached Dhaouadi and thesis co-advisor is Dr. Maher Bakri-Kassem. Soft and hard copy available.

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