Modeling and Control of a Thermally Driven MEMS Actuator for RF Applications
A Master of Science thesis in Electrical Engineering by Shahabeddin Vamegh Estahbanati entitled, "Modeling and Control of a Thermally Driven MEMS Actuator for RF Applications," submitted in May 2017. Thesis advisor is Dr. Rached Dhaouadi and thesis co-advisor is Dr. Maher Bakri-Kassem. Sof...
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| Format: | doctoralThesis |
| Published: |
2017
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| Online Access: | http://hdl.handle.net/11073/8913 |
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