Experimental Characterization of Electrostatic MEMS Resonators for Sensing Applications

Experimental Characterization of Electrostatic MEMS Resonators for Sensing Applications

A Master of Science thesis in Mechatronics Engineering by Basil Yousef Ahmad Alattar entitled, “Experimental Characterization of Electrostatic MEMS Resonators for Sensing Applications”, submitted in April 2023. Thesis advisor is Dr. Mehdi Ghommem. Soft copy is available (Thesis, Completion Certifica...

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Bibliographic Details
Main Author: Alattar, Basil Yousef Ahmad (author)
Format: doctoralThesis
Published: 2023
Subjects:
MEMS resonator
Electrostatic actuation
Motion-induced current
Nonlinear analysis
Bifurcation
Hysteresis
Online Access:http://hdl.handle.net/11073/25318
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http://hdl.handle.net/11073/25318

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