L., K., Merabet, H., Chauvat, M., Frilay, C., Portier, X., Labbe, C., . . . Gourbilleau, F. (2022). Comprehensive investigation of Er2O3 thin films grown with different ALD approaches.
Chicago Style (17th ed.) CitationL., Khomenkova, et al. Comprehensive Investigation of Er2O3 Thin Films Grown with Different ALD Approaches. 2022.
MLA (9th ed.) CitationL., Khomenkova, et al. Comprehensive Investigation of Er2O3 Thin Films Grown with Different ALD Approaches. 2022.
Warning: These citations may not always be 100% accurate.