Comprehensive investigation of Er2O3 thin films grown with different ALD approaches
The effect of Er precursor nature (Er(CpMe)3 or Er(tmhd)3) and annealing treatment at 500–1100 °C on the structural and optical properties of Er2O3 films grown on Si substrates by thermal or O2-plasma-assisted atomic layer deposition was studied by means of spectroscopic ellipsometry, Fourier-transf...
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | , , , , , , , , , |
| Format: | article |
| Published: |
2022
|
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1016/j.surfin.2022.102377 https://www.sciencedirect.com/science/article/pii/S2468023022006381 http://hdl.handle.net/10576/52675 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|