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step decrease » sizes decrease (Expand Search), teer decrease (Expand Search)
we decrease » _ decrease (Expand Search), nn decrease (Expand Search), teer decrease (Expand Search)
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Ab Initio Calculations of the Reaction Mechanisms for Metal−Nitride Deposition from Organo-Metallic Precursors onto Functionalized Self-Assembled Monolayers
Published 2006“…The predicted order of reactivity of differently terminated SAMs and the temperature dependence of the initial reaction probability have been confirmed for Ti-based precursors by recent experimental results. We predict that the replacement of methyl groups by trifluoromethyl groups on the SAM backbone decreases the activation barrier for amine-terminated SAMs by 5 kcal/mol. …”
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