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  1. 3321

    Alkenyl/Thiol Co-Functionalized Titanium-Oxo Nanoclusters Enable Synergistic Lithography for Enhanced Resolution and Sensitivity by Zuohu Zhou (14258773)

    Published 2025
    “…Moreover, thiol groups were further incorporated into the alkenyl-TOCs, giving rise to alkenyl/thiol comodified clusters. Such dual cross-linkable group functionalization brought additional thiol–ene click reactions upon exposure to enhance intercluster polymerization, which significantly improved the lithography sensitivity of TOCs, with the required exposure energy being reduced by over 70% (decreasing from >1000 μC/cm<sup>2</sup> of alkenyl-TOC to <300 μC/cm<sup>2</sup> of alkenyl/thiol-TOC). …”
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