STUDY OF ALUMINUM OXYNITRIDE THIN FILMS GROWN BY REACTIVE MAGNETRON SPUTTERING
Saved in:
| Main Author: | |
|---|---|
| Format: | masterThesis |
| Published: |
2020
|
| Subjects: | |
| Online Access: | https://eprints.kfupm.edu.sa/id/eprint/143710/2/organized.pdf |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|