APA (7th ed.) Citation

unknown. (2020). STUDY OF ALUMINUM OXYNITRIDE THIN FILMS GROWN BY REACTIVE MAGNETRON SPUTTERING.

Chicago Style (17th ed.) Citation

unknown. STUDY OF ALUMINUM OXYNITRIDE THIN FILMS GROWN BY REACTIVE MAGNETRON SPUTTERING. 2020.

MLA (9th ed.) Citation

unknown. STUDY OF ALUMINUM OXYNITRIDE THIN FILMS GROWN BY REACTIVE MAGNETRON SPUTTERING. 2020.

Warning: These citations may not always be 100% accurate.