Alkenyl/Thiol Co-Functionalized Titanium-Oxo Nanoclusters Enable Synergistic Lithography for Enhanced Resolution and Sensitivity

The lack of lithographic reactivity of titanium oxides prevents their applicability in direct nanopatterning technologies. Herein, by gradually incorporating cross-linkable alkenyl and thiol groups, we have successfully achieved the lithography applications and performance enhancement of monometalli...

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Main Author:	Zuohu Zhou (14258773) (author)
Other Authors:	Zeqi Yu (13564966) (author), Ni Zhen (3774214) (author), Fangfang Liu (185161) (author), Jian Wei (802495) (author), Aibing Yang (11991874) (author), Siming Qi (13960103) (author), Huifang Zhao (3341825) (author), Feng Luo (47640) (author), Lei Zhang (38117) (author)
Published:	2025
Subjects:	Biochemistry Cell Biology Molecular Biology Neuroscience Biotechnology Ecology Developmental Biology Cancer Infectious Diseases Chemical Sciences not elsewhere classified Physical Sciences not elsewhere classified required exposure energy functional magnolol ligands 9 nm patterns titanium oxides prevents titanium oxide materials linked network ). higher resolution levels 2 ′- biphenol induced alkenyl polymerization gradually incorporating cross fabricated using alkenyl enhance intercluster polymerization direct nanopatterning technologies thiol comodified clusters 2 </ sup direct nanopatterning oxo clusters monometallic titanium functionalized titanium resolution 12 nanopatterning performance enhanced resolution linkable alkenyl insoluble cross dual cross toc ). thiol groups thiol co successfully achieved soluble cluster significantly improved performance enhancement lithographic reactivity giving rise electron beam also provides 300 μc 1000 μc
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Alkenyl/Thiol Co-Functionalized Titanium-Oxo Nanoclusters Enable Synergistic Lithography for Enhanced Resolution and Sensitivity

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