Deep Learning-Driven Modeling of Oxygen Redistribution and Thermal Transport in Silicon-on-Insulator and Buried-Oxide Layers for SIMOX processDeep Learning-Driven Modeling of Oxygen Redistribution and Thermal Transport in Silicon-on-Insulator and Buried-Oxide Layers for SIMOX process

<p dir="ltr">Data and code supporting the key findings of “Deep Learning-Driven Modeling of Oxygen Redistribution and Thermal Transport in Silicon-on-Insulator and Buried-Oxide Layers for SIMOX process”.</p>

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التفاصيل البيبلوغرافية
المؤلف الرئيسي:	Jiashu Chen (19669441) (author)
منشور في:	2025
الموضوعات:	Atomic and molecular physics ion implantation doses Diffusion simulation Deep Neural Network Approach Molecular Dynamics Simulation Investigation Silicon
الوسوم:	إضافة وسم لا توجد وسوم, كن أول من يضع وسما على هذه التسجيلة!

Deep Learning-Driven Modeling of Oxygen Redistribution and Thermal Transport in Silicon-on-Insulator and Buried-Oxide Layers for SIMOX processDeep Learning-Driven Modeling of Oxygen Redistribution and Thermal Transport in Silicon-on-Insulator and Buried-Oxide Layers for SIMOX process

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