Deep-Ultraviolet AlN Metalens with Imaging and Ultrafast Laser Microfabrication Applications

Deep-ultraviolet (DUV) light is essential for applications including fabrication, molecular research, and biomedical imaging. Compact metalenses have the potential to drive further innovation in these fields, provided they utilize a material platform that is cost-effective, durable, and scalable. In...

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التفاصيل البيبلوغرافية
المؤلف الرئيسي:	Yu Chieh Peng (20503397) (author)
مؤلفون آخرون:	Yu Jie Wang (20636922) (author), Kuan-Heng Chen (20503388) (author), Yu Hung Lin (20636925) (author), Haruyuki Sakurai (11791400) (author), Hsueh-Chih Chang (20636928) (author), Cheng-Ching Chiang (20636931) (author), Ruei-Tzu Duh (20636934) (author), Bo-Ray Lee (20503379) (author), Chia-Yen Huang (295070) (author), Min-Hsiung Shih (5134991) (author), Ray-Hua Horng (8352027) (author), Kuniaki Konishi (5558021) (author), Ming Lun Tseng (2050735) (author)
منشور في:	2025
الموضوعات:	Biophysics Pharmacology Biotechnology Space Science Chemical Sciences not elsewhere classified Physical Sciences not elsewhere classified theoretical diffraction limit present aluminum nitride critical wavelength regime advancing photonic technologies applications including fabrication imaging capabilities close deliver duv focusing ultraviolet aln metalens duv applications silicon substrate significant promise results underscore polymer film molecular research material platform efficient solution biomedical imaging 380 nm
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Deep-Ultraviolet AlN Metalens with Imaging and Ultrafast Laser Microfabrication Applications

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