Supplement number 1

supplementary Material

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书目详细资料
主要作者:	Jinyu Chong (9586657) (author)
其他作者:	Rose Kopf (15440186) (author), Jake Kaufman (21671579) (author), Chen Xu (53797) (author), Mark Cappuzzo (15440183) (author), Alaric Tate (15440189) (author), Ting-Chen Hu (15440174) (author), Mark Earnshaw (15440180) (author)
出版:	2025
主题:	Engineering Diamond-like Carbon Hard Mask Fabrication Etching
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