Supplemental Information

Furkejuvvon:

Bibliográfalaš dieđut
Váldodahkki:	Yi Chen (38576) (author)
Eará dahkkit:	Daniel Cho (6813263) (author), John Hoang (4244698) (author), Nick Altieri (21377180) (author), Ji Zhu (106734) (author), Samantha Tan (21377183) (author), Jane Chang (446866) (author)
Almmustuhtton:	2025
Fáttát:	Chemical sciences Thermal etch Selective SiGe etch Kinetics model
Fáddágilkorat:	Lasit fáddágilkoriid Eai fáddágilkorat, Lasit vuosttaš fáddágilkora!

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