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Bibliographic Details
Main Author:	Maike Gremmel (14521300) (author)
Other Authors:	Chandrashekhar Savant (18945523) (author), Debaditya Bhattacharya (15071761) (author), Georg Schönweger (20481962) (author), Debdeep Jena (1661221) (author), Simon Fichtner (1424269) (author)
Published:	2025
Subjects:	Engineering ferroelectricity thin films AlScN leakage imprint
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