Self-aligned mechanical attachment of carbon nanotubes to silicon dioxide structures by selective silicon dioxide chemical-vapor deposition
A self-aligned thin-film deposition technique was developed to mechanically attach carbon nanotubes to surfaces for the fabrication of structurally robust nanotube-based nanomechanical devices. Single-walled carbon nanotubes were grown by thermal chemical-vapor deposition (CVD) across 150-nm-wide SiO...
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| Other Authors: | , , , |
| Format: | article |
| Published: |
2003
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| Subjects: | |
| Online Access: | http://hdl.handle.net/11073/20685 |
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