Self-aligned mechanical attachment of carbon nanotubes to silicon dioxide structures by selective silicon dioxide chemical-vapor deposition

A self-aligned thin-film deposition technique was developed to mechanically attach carbon nanotubes to surfaces for the fabrication of structurally robust nanotube-based nanomechanical devices. Single-walled carbon nanotubes were grown by thermal chemical-vapor deposition (CVD) across 150-nm-wide SiO...

وصف كامل

محفوظ في:
التفاصيل البيبلوغرافية
المؤلف الرئيسي: Whittaker, Jed D. (author)
مؤلفون آخرون: Brink, Markus (author), Husseini, Ghaleb (author), Linford, Matthew R. (author), Davis, Robert C. (author)
التنسيق: article
منشور في: 2003
الموضوعات:
الوصول للمادة أونلاين:http://hdl.handle.net/11073/20685
الوسوم: إضافة وسم
لا توجد وسوم, كن أول من يضع وسما على هذه التسجيلة!
_version_ 1864513438856773632
author Whittaker, Jed D.
author2 Brink, Markus
Husseini, Ghaleb
Linford, Matthew R.
Davis, Robert C.
author2_role author
author
author
author
author_facet Whittaker, Jed D.
Brink, Markus
Husseini, Ghaleb
Linford, Matthew R.
Davis, Robert C.
author_role author
dc.creator.none.fl_str_mv Whittaker, Jed D.
Brink, Markus
Husseini, Ghaleb
Linford, Matthew R.
Davis, Robert C.
dc.date.none.fl_str_mv 2003
2021-01-13T07:41:40Z
2021-01-13T07:41:40Z
dc.format.none.fl_str_mv application/pdf
dc.identifier.none.fl_str_mv Self-aligned mechanical attachment of carbon nanotubes to silicon dioxide structures by selective silicon dioxide chemical-vapor deposition, Jed D. Whittaker, Markus Brink ,Ghaleb A. Husseini and Matthew R. Linford, Robert C. Davis, Applied Physics Letters, 83, 5307-5309 (2003) https://doi.org/10.1063/1.1636267
1077-3118
http://hdl.handle.net/11073/20685
10.1063/1.1636267
dc.language.none.fl_str_mv en_US
dc.publisher.none.fl_str_mv American Institute of Physics (AIP)
dc.relation.none.fl_str_mv https://doi.org/10.1063/1.1636267
dc.subject.none.fl_str_mv Metal oxides
Silicates
Chemical vapor deposition
Chemical elements
Thin film deposition
Nanotubes
dc.title.none.fl_str_mv Self-aligned mechanical attachment of carbon nanotubes to silicon dioxide structures by selective silicon dioxide chemical-vapor deposition
dc.type.none.fl_str_mv Peer-Reviewed
Published version
info:eu-repo/semantics/publishedVersion
info:eu-repo/semantics/article
description A self-aligned thin-film deposition technique was developed to mechanically attach carbon nanotubes to surfaces for the fabrication of structurally robust nanotube-based nanomechanical devices. Single-walled carbon nanotubes were grown by thermal chemical-vapor deposition (CVD) across 150-nm-wide SiO2 trenches. The nanotubes were mechanically attached to the trench tops by selective silicon tetraacetate-based SiO2 CVD. No film was deposited on the nanotubes where they were suspended across the trenches.
format article
id aus_7a661e76fc115e66d9589b757bc4377e
identifier_str_mv Self-aligned mechanical attachment of carbon nanotubes to silicon dioxide structures by selective silicon dioxide chemical-vapor deposition, Jed D. Whittaker, Markus Brink ,Ghaleb A. Husseini and Matthew R. Linford, Robert C. Davis, Applied Physics Letters, 83, 5307-5309 (2003) https://doi.org/10.1063/1.1636267
1077-3118
10.1063/1.1636267
language_invalid_str_mv en_US
network_acronym_str aus
network_name_str aus
oai_identifier_str oai:repository.aus.edu:11073/20685
publishDate 2003
publisher.none.fl_str_mv American Institute of Physics (AIP)
repository.mail.fl_str_mv
repository.name.fl_str_mv
repository_id_str
spelling Self-aligned mechanical attachment of carbon nanotubes to silicon dioxide structures by selective silicon dioxide chemical-vapor depositionWhittaker, Jed D.Brink, MarkusHusseini, GhalebLinford, Matthew R.Davis, Robert C.Metal oxidesSilicatesChemical vapor depositionChemical elementsThin film depositionNanotubesA self-aligned thin-film deposition technique was developed to mechanically attach carbon nanotubes to surfaces for the fabrication of structurally robust nanotube-based nanomechanical devices. Single-walled carbon nanotubes were grown by thermal chemical-vapor deposition (CVD) across 150-nm-wide SiO2 trenches. The nanotubes were mechanically attached to the trench tops by selective silicon tetraacetate-based SiO2 CVD. No film was deposited on the nanotubes where they were suspended across the trenches.American Institute of Physics (AIP)2021-01-13T07:41:40Z2021-01-13T07:41:40Z2003Peer-ReviewedPublished versioninfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfSelf-aligned mechanical attachment of carbon nanotubes to silicon dioxide structures by selective silicon dioxide chemical-vapor deposition, Jed D. Whittaker, Markus Brink ,Ghaleb A. Husseini and Matthew R. Linford, Robert C. Davis, Applied Physics Letters, 83, 5307-5309 (2003) https://doi.org/10.1063/1.16362671077-3118http://hdl.handle.net/11073/2068510.1063/1.1636267en_UShttps://doi.org/10.1063/1.1636267oai:repository.aus.edu:11073/206852024-08-22T12:03:57Z
spellingShingle Self-aligned mechanical attachment of carbon nanotubes to silicon dioxide structures by selective silicon dioxide chemical-vapor deposition
Whittaker, Jed D.
Metal oxides
Silicates
Chemical vapor deposition
Chemical elements
Thin film deposition
Nanotubes
status_str publishedVersion
title Self-aligned mechanical attachment of carbon nanotubes to silicon dioxide structures by selective silicon dioxide chemical-vapor deposition
title_full Self-aligned mechanical attachment of carbon nanotubes to silicon dioxide structures by selective silicon dioxide chemical-vapor deposition
title_fullStr Self-aligned mechanical attachment of carbon nanotubes to silicon dioxide structures by selective silicon dioxide chemical-vapor deposition
title_full_unstemmed Self-aligned mechanical attachment of carbon nanotubes to silicon dioxide structures by selective silicon dioxide chemical-vapor deposition
title_short Self-aligned mechanical attachment of carbon nanotubes to silicon dioxide structures by selective silicon dioxide chemical-vapor deposition
title_sort Self-aligned mechanical attachment of carbon nanotubes to silicon dioxide structures by selective silicon dioxide chemical-vapor deposition
topic Metal oxides
Silicates
Chemical vapor deposition
Chemical elements
Thin film deposition
Nanotubes
url http://hdl.handle.net/11073/20685